RE-3500
A film thickness measurement system that measures tiny 40 µm square areas with a spectroscopic ellipsometer. Twice the throughput of the previous model.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Spectroscopic ellipsometer (single-wavelength ellipsometer optional) |
|---|---|
| Measurement area | 40 µm square |
| Throughput | Twice the previous model |
Specifications as published by the maker. See the sources below.
Overview
RE-3500 is SCREEN's ellipsometric film thickness measurement system. It is a metrology tool for electronic devices for IoT.
Micro-spot optics measure small 40 µm square areas with high accuracy. A newly developed optical head achieves twice the throughput of the previous model.
With a spectroscopic ellipsometer, it measures film thickness and optical constants at the same time, making it suited to processes where film quality control matters, thin film material development and deposition process development. An optional single-wavelength ellipsometer measures ultra-thin films under 20 nm with high accuracy. A long-life laser diode light source lowers operating cost.
Key features
- Measurement of tiny 40 µm square areas
- Simultaneous measurement of thickness and optical constants
- Single-wavelength ellipsometer (optional)
- Twice the throughput
Applications
- Thickness and quality control of thin films
- Deposition process development
Other ellipsometers
- UVISEL Plus · HORIBA
- FE-5000 series · Otsuka Electronics
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RF-200EX / RF-300EX · Coater/developers
Sources
Ellipsometers
Last updated: October 23, 2026