Equipment interfaces (SECS/GEM)

QuickOnline

Toshiba's SECS/HSMS/GEM communication software.

Maker: Toshiba Electronic Devices & Storage · Official product page

Specifications


StandardsSECS / HSMS / GEM
AvailabilityCommunication software
Main applicationsBringing manufacturing equipment online

Specifications as published by the maker. See the sources below.

Overview


QuickOnline is Toshiba's SECS/HSMS/GEM communication software. It aims to bridge the communication gap between a factory's manufacturing execution system (MES host) and semiconductor equipment, bringing equipment online quickly.

It supports the HSMS and SECS-I protocols and fully supports compliance with SECS-II and GEM (Generic Equipment Model). It can handle several pieces of equipment and several transactions at the same time.

It absorbs differences between host and equipment specifications and adapts flexibly, so existing communication software does not need to be changed. It helps migrate equipment to the GEM standard, and its extensive API library can be used for application development. Because message conversion and processing can be done through configuration, it shortens the time to bring equipment online, lowers software development cost and supports central management of multiple tools by the MES.

Key features


Applications


Other equipment interfaces (secs/gem)


Sources


  1. Toshiba: QuickOnline product page

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Last updated: October 23, 2026