MEMS manufacturing equipment

HA7300

A test cell that controls the temperature of 8 devices at once and applies temperature and pressure together to test differential pressure sensors.

Maker: Advantest · Official product page

Specifications


Temperature control8 devices at once (cold or hot temperature plates)
Pressure2-port pressure controller, pressure nozzles
TargetDifferential pressure sensors for diesel exhaust systems and others

Specifications as published by the maker. See the sources below.

Overview


HA7300 is Advantest's Stimulus Test Cell. Diesel engine exhaust systems use differential pressure sensors to monitor exhaust gas pressure and keep particulate filters and oxidation catalysts working, and HA7300 is used to test those sensors.

A temperature application unit that adjusts the temperature of 8 devices at once, a newly developed 2-port pressure controller and pressure nozzles provide a fast, accurate temperature and pressure test environment. Cold or hot temperature plates and thermal pushers control the temperature of 8 devices together, testing temperature characteristics at high throughput.

Pressure nozzles integrated with the thermal pushers apply temperature and pressure at the same time, applying independent pressures to P0 and P1 to obtain accurate pressure characteristics in a short time. Combined with EVA100 and a handler, it creates a consistent environment from design evaluation through volume production testing.

Key features


Applications


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More from Advantest


Sources


  1. Advantest: HA7300 product page

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MEMS manufacturing equipment

Last updated: October 23, 2026