Mass flow controllers (MFC)

FCS®-P8500

Name: FCS-P8500
Brand: Fujikin

A pressure-based gas flow controller developed by Fujikin. In the same housing as earlier models, it has 10 times the control range and 40 times the accuracy.

Maker: Fujikin · Official product page

Specifications

Measurement method	Pressure-based (sonic condition at the orifice)
Accuracy and response	Response of 0.5 seconds or less
Key feature	Unaffected by supply pressure fluctuation, works with any gas type
Main applications	Gas supply for deposition and etching

Specifications as published by the maker. See the sources below.

Overview

FCS-P8500 is Fujikin's pressure-based flow controller (FCS). It combines a high-precision pressure sensor with an orifice and controls gas flow with a control valve while monitoring the pressure upstream and downstream of the orifice.

The flow range is 1 to 1,000 cm³ per minute, covering in one unit a range that used to need 3 units. Rangeability is 10 times wider and flow control accuracy 40 times higher than earlier models. High-flow and low-flow paths, two in all, are integrated in one housing, and switching between flows is seamless with overshoot of 2% or less. The range over which high accuracy is guaranteed at low flows has also been greatly widened.

It is used to supply process gases for deposition and etching in semiconductor equipment, handles several gas types, and allows 3 types of gas supply lines to fit in a gas box. It supports 3 communication methods: EtherCAT, DeviceNet and RS485.

Key features

Pressure-based control (monitors pressure upstream and downstream of the orifice)
Flow of 1 to 1,000 cm³/min in one unit
10 times the rangeability and 40 times the accuracy of earlier models
High-flow and low-flow paths integrated in one housing

Applications

Process gas flow control for deposition and etching tools

Other mass flow controllers (mfc)

CRITERION D500 · HORIBA

Sources

Fujikin: FCS-P8500 product page