IGS® integrated gas system

Specifications

Specifications as published by the maker. See the sources below.

Overview

IGS (Integrated Gas System) is Fujikin's technology for integrating gas supply lines. Individual components such as valves, filters and pressure regulators are arranged on base blocks and connected with W-seals to form the gas box of semiconductor equipment.

The W-seal fitting carries over the UPG sealing method, sealing each point with 2 bolts. It can carry the FCS pressure-based flow controller, and because flow does not change with fluctuations in supply pressure, it supplies gas stably even in multi-chamber environments. A leveling system absorbs manufacturing variation in sheet metal and lower blocks.

It is about 1/3 the size of conventional systems, and because components can be removed from above, replacement time is cut to about 1/5. The leak rate is 1/1,000 trillion cc per second or less. It is used in thin film CVD, etching tools, multi-chamber systems and gas distribution boxes, and received an excellence award at the 1st Monodzukuri Nippon Grand Award in 2005.

Key features

• Integrated structure of base blocks and W-seals
• About 1/3 the size of conventional systems, replacement time about 1/5
• Resistant to supply pressure fluctuations with FCS
• Leak rate of 1/1,000 trillion cc per second or less

Applications

• Gas boxes for CVD and etching tools
• Multi-chamber systems and gas distribution boxes

Other fluid and gas components (fittings and tubing)

• NRD series high-pressure diaphragm valves · KITZ SCT

More from Fujikin

• FCS®-P8500 · Mass flow controllers (MFC)

Sources

1. Fujikin: IGS product page

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