Gas supply systems and bulk gas equipment
Cylinder cabinets / BSGS / IGSS
Cylinder cabinets compliant with Japan's High Pressure Gas Safety Act, and bulk supply systems (BSGS) that deliver large volumes of specialty gases. IGSS, including the Cdrive automated transfer robot, is also available.
Maker: Taiyo Nippon Sanso · Official product page
Specifications
| Supply type | Cylinder cabinets / bulk supply (BSGS) |
|---|---|
| Main applications | Specialty gas supply to semiconductor fabs |
Specifications as published by the maker. See the sources below.
Overview
Taiyo Nippon Sanso's gas supply systems include cylinder cabinets compliant with the High Pressure Gas Safety Act and bulk specialty gas supply systems (BSGS) that deliver large volumes of specialty gases.
It also offers IGSS, including the Cdrive transfer robot that automates cylinder exchange, and these systems are used to supply specialty gases to semiconductor fabs.
Key features
- Cylinder cabinets
- Bulk supply systems (BSGS)
- IGSS including the Cdrive automated transfer robot
Applications
- Specialty gas supply to semiconductor fabs
More from Taiyo Nippon Sanso
- SR-4000HT · MOCVD equipment
Sources
Last updated: October 23, 2026