Pressure controllers and flow meters

PGM series

CKD's process gas regulators with metal diaphragms. They cover everything from single-line piping to integrated types.

Specifications

Controlled variable	Supply gas pressure (vacuum to 0.7 MPa)
Configuration	Metal diaphragm regulators (20 to 200 L/min)
Key feature	High sealing, stable control of very small flows
Main applications	Process gas supply in the front end

Specifications as published by the maker. See the sources below.

Overview

The PGM series are CKD's regulators (pressure reducing valves) for process gases. They keep gas pressure constant when supplying gas in semiconductor manufacturing equipment and chemical supply systems.

The set pressure range is -0.07 to 0.7 MPa, with models from PGM-30V (-0.07 to 0.21 MPa) to PGM-100 (0 to 0.7 MPa). Flow is 20 L/min, 50 L/min or 200 L/min depending on the model. There are 10 models, including -V types for vacuum and -H and -2H types for high flow.

An optimized valve seat design gives high sealing performance, and precision machining keeps pressure hysteresis small. Stable control of very small flows and high repeatability help stabilize processes.

Key features

Set pressure -0.07 to 0.7 MPa
Flow of 20 / 50 / 200 L/min
High sealing and small pressure hysteresis
10 models including vacuum and high-flow types

Applications

Process gas pressure reduction in semiconductor equipment (front end)
Chemical supply systems

Sources

CKD: PGM series product page