EV-M series
Ebara's dry vacuum pump for heavy-duty processes that generate reaction by-products. Corrosion-resistant materials are standard.
Maker: Ebara · Official product page
Specifications
| Type | Dry vacuum pump (rotation speed control) |
|---|---|
| Key feature | Energy-saving operation; models with pumping speeds up to 110,000 L/min |
| Series | EV-M / EV-X |
| Main applications | Etching, CVD, diffusion |
Specifications as published by the maker. See the sources below.
Overview
The EV-M is Ebara's dry vacuum pump suited to energy saving and heavy-duty processes. Among semiconductor, LCD and solar cell manufacturing processes, it handles heavy-duty processes that generate reaction by-products using Ebara's own high-temperature technology.
High energy-saving performance lets it handle heavy-duty processes while saving energy at the same time. Corrosion-resistant materials are standard, and options that further raise corrosion resistance are available. It is oil-free, delivers the same performance at 50 Hz and 60 Hz, and can meet CE marking, SEMI-S2 and NRTL.
The lineup ranges from EV-M20N with a pumping speed of 1,800 L/min, through models of 10,000 to 80,000 L/min, to EV-M1205SF at up to 110,000 L/min. Ultimate pressure is 0.5 Pa (5 Pa for EV-M20N). Depending on process conditions, it can handle a wide range of heavy-duty processes.
Key features
- Handles heavy-duty processes with Ebara's own high-temperature technology
- High energy-saving performance
- Corrosion-resistant materials as standard, oil-free
- Pumping speeds from 1,800 to 110,000 L/min
Applications
- Exhaust from heavy-duty processes such as CVD and etching
- LCD and solar cell manufacturing processes
Other vacuum pumps
- NeoDry G series · Kashiyama Industries
More from Ebara
- F-REX300X · Metal CMP equipment
- F-REX300XA · Oxide CMP equipment
- TND-Single (including TND-Single Plus) · Exhaust gas abatement systems
- UFP600AS · TSV formation equipment
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026