Litho Booster
Nikon's alignment station that quickly measures grid distortion on every wafer before exposure and feeds corrections forward to the lithography tool.
Maker: Nikon · Official product page
Specifications
| Measurement | Grid distortion of all shots on every wafer before exposure |
|---|---|
| Correction | Feedforward to the lithography tool |
| Combination | Immersion scanners, dry scanners |
Specifications as published by the maker. See the sources below.
Overview
Litho Booster is a high-performance alignment station that draws on technology Nikon has developed in lithography. It quickly and accurately measures the absolute grid distortion of every wafer before exposure.
Feeding the measured correction values forward to the lithography tool greatly improves overlay accuracy without lowering the tool's throughput, helping improve product yield and capital efficiency. Detecting and correcting in advance the distortions that arise by layer, lot, wafer and shot has become an important challenge.
It can be combined not only with immersion scanners but also with dry scanners. Aligning every shot reduces the effect of wafer distortion arising from wafer bonding (wafer-to-wafer bonding) and other processes, improving OPO (On Product Overlay).
Key features
- Measures every wafer before exposure
- Feedforward correction
- Works with both immersion and dry scanners
- Better OPO
Applications
- Improving overlay accuracy
- Wafer bonding processes
More from Nikon
Sources
Front-end equipment: more products
Last updated: October 23, 2026