AMI-5700
Nikon's automated macro inspection system that images the whole wafer at once for fast inspection and also measures CD, film thickness and focus in one tool.
Maker: Nikon · Official product page
Specifications
| Applicable wafers | SEMI-compliant 300 mm notched wafers |
|---|---|
| Inspection throughput | 180 wafers per hour or more (standard magnification) |
| Measurement (optional) | CD, film thickness, focus |
Specifications as published by the maker. See the sources below.
Overview
AMI-5700 is Nikon's automated macro inspection system. It combines high throughput with excellent detection sensitivity, with further gains in sensitivity and accuracy over the previous model. Besides fast inspection by imaging the whole wafer at once, it can also measure quickly, performing inspection and measurement in one tool.
It detects pattern defects and coating unevenness from diffracted light and particles and scratches of 15 µm size by scatter inspection, and backside particle and scratch inspection is available as an option. Functions include image processing with good-die learning, automatic recipe creation, ADC (automatic defect classification) and automated rework decisions.
CD, film thickness and focus measurement can be run at the same time as options. It handles 300 mm notched wafers, with a choice of 2 or 3 ports. Inspection throughput is 180 wafers per hour or more at standard magnification. Inspecting every wafer catches random defects.
Key features
- Whole-wafer imaging in one shot
- 180 wafers per hour or more
- Inspection and measurement in one tool
- Inspection of every wafer
Applications
- Macro inspection in lithography
- Detection of coating unevenness and pattern defects
Other macro inspection equipment
- CIEL series · Lasertec
- EZ300 · Lasertec
- LX series · Lasertec
- OPTISTATION-3200 · Nikon
- ZI-2000 · SCREEN Holdings
- ZI-3600 · SCREEN Holdings
More from Nikon
- DSP-100 · Laser direct imaging systems
- Litho Booster · Overlay metrology
- NSR-2205iL1 · i-line steppers
- NSR-S215D · DUV lithography systems
- NSR-S220D · DUV lithography systems
- NSR-S322F · DUV lithography systems
- NSR-S333F · DUV lithography systems
- NSR-S625E · DUV lithography systems
Sources
Macro inspection equipment
Last updated: October 23, 2026