Vacuum gauges
CCMT-D series
ULVAC's capacitance manometer that measures pressure with a diaphragm in a one-piece ceramic structure.
Maker: ULVAC · Official product page
Specifications
| Measurement method | Ceramic capacitance manometer |
|---|---|
| Measurement range | CCMT-1D / 10D / 100D / 1000D |
| Key feature | Corrosion-resistant ceramic diaphragm, built-in temperature compensation circuit |
| Main applications | Pressure monitoring of deposition tools and vacuum furnaces |
Specifications as published by the maker. See the sources below.
Overview
The CCMT-D series is ULVAC's capacitance manometer (diaphragm vacuum gauge). It measures pressure with a diaphragm made in a one-piece ceramic structure.
The ceramic diaphragm resists corrosion, and a temperature compensation circuit is built in. Models with different measurement ranges are available, CCMT-1D/10D/100D/1000D, and they are used to monitor pressure in deposition tools and vacuum furnaces.
Key features
- Diaphragm in a one-piece ceramic structure
- Corrosion resistance and built-in temperature compensation
- Ranges from 1D to 1000D
Applications
- Pressure monitoring of deposition tools and vacuum furnaces
More from ULVAC
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- CME · PECVD equipment
- CME-200E · CVD equipment
- CS · Sputtering equipment
- ei-5 · Vacuum evaporation equipment
- ei-5 / EVD-600LP · Vacuum evaporation equipment
- ENTRON-EX W300 · PVD equipment
- ENTRON-EXX · PVD equipment
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026