HELIOT 900 series
A helium leak detector that fully renews ULVAC's mainstay HELIOT 710. Faster pumping lets one person test efficiently.
Maker: ULVAC · Official product page
Specifications
| Detection method | Helium (hydrogen mode standard) |
|---|---|
| Pumping and configuration | Helium pumping speed 5 L/s, oil-sealed rotary or dry scroll backing pump |
| Main applications | Leak testing of vacuum equipment and parts |
Specifications as published by the maker. See the sources below.
Overview
The HELIOT 900 series is ULVAC's helium leak detector. It uses helium as a tracer gas to detect tiny leaks in vacuum equipment and parts.
The minimum display resolution in He ULTRA mode is 0.01×10⁻¹² Pa·m³/sec, a high-sensitivity design that misses even tiny leaks. Helium pumping speed is 5 L/sec, and with an auxiliary pump it covers a range of 30 to 500 L/min. It can be used with both the vacuum method and the sniffer method.
A wireless controller allows operation from 40 m away, and maintenance panels come off easily for simple maintenance. Models are 901W1 (up to 5 L, portable) and 904W2 (up to 50 L, mobile) with oil-sealed rotary pumps, and 901D2 (up to 5 L), 904D3R (up to 50 L) and 904D4R (up to 200 L) with dry pumps.
Key features
- Minimum display resolution of 0.01×10⁻¹² Pa·m³/s
- Supports both the vacuum and sniffer methods
- Wireless controller (40 m)
- 5 models with oil-sealed rotary or dry pumps
Applications
- Leak testing of semiconductor equipment and vacuum parts
More from ULVAC
- CC-200 · PECVD equipment
- CCMT-D series · Vacuum gauges
- CME · PECVD equipment
- CME-200E · CVD equipment
- CS · Sputtering equipment
- ei-5 · Vacuum evaporation equipment
- ei-5 / EVD-600LP · Vacuum evaporation equipment
- ENTRON-EX W300 · PVD equipment
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026