Cryopumps
CRYO-U series
ULVAC Cryogenics' cryopumps developed from ULVAC's vacuum technology and CTI's cryogenic technology.
Maker: ULVAC Cryogenics · Official product page
Specifications
| Diameter | 4 to 30 inch (CRYO-U4H to U30H) |
|---|---|
| Key feature | Pumps all gases, no liquid nitrogen needed |
| Main applications | High-vacuum pumping for sputtering, ion implantation and evaporation tools |
Specifications as published by the maker. See the sources below.
Overview
The CRYO-U series are ULVAC Cryogenics' cryopumps. They were developed from ULVAC's vacuum technology and CTI's cryogenic technology.
Diameters range from 4 to 30 inch (CRYO-U4H to U30H). They pump all gases and need no liquid nitrogen. They are used to create high vacuum in sputtering, ion implantation and evaporation tools.
Key features
- Diameters of 4 to 30 inch
- Pumps all gases
- No liquid nitrogen needed
Applications
- High-vacuum pumping for sputtering, ion implantation and evaporation tools
Other cryopumps
- Marathon® CP · Sumitomo Heavy Industries
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026