Wafer marking and ID readers
SL473 series wafer markers
Systems that laser-mark wafers with control information such as product name and lot number. Some models support SiC and GaN.
Maker: TOWA LASERFRONT · Official product page
Specifications
| Type | Laser marking (automatic power correction) |
|---|---|
| Supported materials | Si, GaAs, SiC, GaN |
| Related models | SL473FS/FT (high-throughput types with 2 and 4 carriers) |
| Main applications | ID marking on wafers |
Specifications as published by the maker. See the sources below.
Overview
The SL473 series are TOWA LASERFRONT's wafer markers. They engrave control information such as product names and lot numbers on wafers with a laser.
They have automatic laser power correction, and some models support SiC and GaN as well as Si and GaAs. There are also SL473FS/FT high-throughput types with 2 and 4 carriers.
Key features
- Automatic laser power correction
- Supports Si, GaAs, SiC and GaN
- High-throughput SL473FS/FT types
Applications
- ID marking on wafers
Sources
Factory automation: more products
Last updated: October 23, 2026