SEMISTAR-GEKKO VD31HDA-C
Yaskawa Electric's vacuum wafer transfer robot that achieves low contamination and fast transfer with vacuum DD motors and steel belts.
Maker: Yaskawa Electric · Official product page
Specifications
| Operating environment | Vacuum (high vacuum compatible) |
|---|---|
| Arm configuration | 4-axis horizontal articulated, dual arm |
| Drive | Vacuum DD motors + steel belts |
| Related models | SEMISTAR-GEKKO MD124D (atmospheric) |
| Main applications | Wafer transfer for deposition and etching tools |
Specifications as published by the maker. See the sources below.
Overview
SEMISTAR-GEKKO VD31HDA-C is Yaskawa Electric's wafer transfer robot for vacuum environments. It hands off wafers quickly in the vacuum transfer chambers of semiconductor equipment.
This 4-degree-of-freedom robot uses vacuum direct-drive motors and steel belts to achieve low-contamination, high-speed wafer transfer. Its dual arms shorten the time needed to swap wafers.
It handles wafers up to 300 mm, with position repeatability of 0.05 mm (P-P) and a body weight of 109 kg. It is used with the SR200 controller.
Key features
- Low contamination and high speed with vacuum DD motors + steel belts
- Dual arms shorten swap time
- 4 degrees of freedom, position repeatability of 0.05 mm
- Supports 300 mm wafers
Applications
- Wafer transfer in vacuum transfer chambers
Other wafer handling robots
- RR493 series (vacuum SCARA arm) · RORZE
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026