Mitsui Chemicals
A chemical group that makes pellicles, the thin membranes that protect photomasks from particles, and in 2021 became the first company to start commercial production of EUV pellicles, under a license from ASML.
三井化学・Materials・Last updated: October 22, 2026
Overview
Mitsui Chemicals was formed in 1997 and is headquartered in Yaesu, Chuo, Tokyo. It has sold pellicles since 1984, and in 2021 began commercial production of EUV pellicles at its Iwakuni-Ohtake Works.
It also makes ICROS Tape, a protective tape that covers the front of wafers during backgrinding. In 2025 it took a 5% share in the consortium that acquired package substrate maker Shinko Electric.
Business: EUV pellicles and wafer protection tapes
Why it matters
An EUV pellicle has to let 13.5 nm light pass through while surviving the heat of exposure, which makes it one of the hardest consumables in lithography.
Its stake in Shinko links it to the JIC-led reorganization of Japan's packaging supply chain.
Main products
- •Pellicles for EUV and optical photomasks
- •ICROS Tape for wafer backgrinding
- •Semiconductor process films
Sites in Japan
Head officeHeadquarters
Chuo, Tokyo
Iwakuni-Ohtake WorksPlant
Yamaguchi
Products (1)
- ICROS Tape (backgrinding surface protection tape) · Dicing and backgrinding tapes