LA-3100
SCREEN's millisecond anneal system that heats and cools the wafer surface with flashes of a few milliseconds from xenon flash lamps. It achieves high dopant activation with a low thermal budget.
Maker: SCREEN Holdings · Official product page
Specifications
| Heating method | Xenon flash lamps (millisecond) |
|---|---|
| Atmosphere | Single-wafer processing, low-oxygen atmosphere |
| Key feature | Measures wafer temperature during flash heating |
| Main applications | Dopant activation in source/drain |
Specifications as published by the maker. See the sources below.
Overview
LA-3100 is a flash lamp anneal system from SCREEN Semiconductor Solutions. It irradiates the wafer with light lasting a few milliseconds from xenon flash lamps, raising and lowering the wafer surface temperature very quickly.
Because it anneals with a low thermal budget (thermal history), it can highly activate the dopants implanted in source and drain while precisely controlling their concentration profiles. It is positioned as a tool that contributes greatly to improving the characteristics of leading-edge devices.
Because it processes wafers one at a time, it can anneal in a strictly controlled low-oxygen atmosphere. While applying millisecond-controlled heat treatment across the whole wafer, it can also measure wafer temperature during flash heating, making it easier to understand and explain temperature-related physical phenomena from the R&D stage.
Key features
- Millisecond anneal with xenon flash lamps
- High dopant activation with a low thermal budget
- Single-wafer processing in a low-oxygen atmosphere
- Measures wafer temperature during flash heating
Applications
- Dopant activation in source/drain
- Ultra-shallow junction formation for advanced devices
More from SCREEN Holdings
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- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- RE-3500 · Ellipsometers
- RF-200EX / RF-300EX · Coater/developers
Sources
Front-end equipment: more products
Last updated: October 23, 2026