DT-3000 (SOKUDO DUO)
A dual-track coater/developer that runs two process lines in parallel. It reaches high throughput while keeping transfer speed moderate.
Maker: SCREEN Holdings · Official product page
Specifications
| Wafer size | 300 mm |
|---|---|
| Throughput | 450 wafers per hour or more |
| Configuration | Dual track (two process lines in parallel) |
| Operation | Production can continue while one line is under maintenance |
| Supported processes | Immersion lithography, electron beam, DSA |
Specifications as published by the maker. See the sources below.
Overview
DT-3000 (SOKUDO DUO) is a 300 mm coater/developer from SCREEN Semiconductor Solutions. Its dual-track design houses two process lines in parallel, achieving throughput of 450 wafers per hour or more.
The advantage of a dual track is that it increases the number of wafers processed without raising transfer speed. Because the transfer system is not pushed hard, reliability is maintained. The two lines can be operated independently, so production continues on one while the other is under maintenance, reducing tool downtime.
Fitting the two lines on a compact platform also greatly reduces footprint. It supports advanced immersion lithography, electron beam and DSA (directed self-assembly), and carries SCREEN's own technologies that help raise production yield.
Key features
- 450 wafers per hour or more with a dual-track design
- Non-stop production by running the two lines independently
- Space-saving design with two lines in one tool
- Supports immersion lithography, electron beam and DSA
Applications
- Resist coating, developing and baking for ArF immersion lithography
- Advanced patterning with electron beam and DSA
Other coater/developers
- RF-200EX / RF-300EX · SCREEN Holdings
- SC-80EX · SCREEN Holdings
- SK-60EX / SK-80EX · SCREEN Holdings
- CLEAN TRACK™ LITHIUS Pro™ · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ AP · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro DICE · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ V · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro Z · Tokyo Electron (TEL)
More from SCREEN Holdings
Sources
Last updated: October 23, 2026