KRATOS ULTRA2 (AXIS Supra+)
An X-ray photoelectron spectrometer optimized for chemical state analysis. It has dedicated analyzers for imaging and for spectroscopy.
Maker: Shimadzu · Official product page
Specifications
| Analysis technique | XPS (imaging XPS) |
|---|---|
| Key feature | Imaging spatial resolution 1 µm, DLD 2D detector |
| Main applications | Elemental, chemical bonding state and depth profile analysis of the outermost surface |
Specifications as published by the maker. See the sources below.
Overview
KRATOS ULTRA2 (AXIS Supra+ in the UK) is Shimadzu's imaging X-ray photoelectron spectrometer (XPS). It analyzes the composition and chemical state of sample surfaces.
Optimized electron optics allow high-sensitivity analysis of large areas, and a 128-channel delay line detector allows measurement in under 1 second. A monochromator with a 500 mm Rowland circle and an Al Kα X-ray source give high energy resolution, detecting even small chemical shifts.
Virtual probe technology positions on small areas, and automatic apertures narrow the analysis area to about 27 µm. Non-scanning projection imaging allows chemical state mapping with 1 µm spatial resolution, and image stitching handles samples several millimeters across. Magnetic charge neutralization limits sample damage, and an ion source supporting gas clusters can be chosen. It can be extended to UPS, AES, SAM, SEM, ISS and SIMS.
Key features
- Large-area, high-sensitivity XPS, measurement in under 1 second
- Monochromator with a 500 mm Rowland circle
- Small-area analysis (about 27 µm) and imaging with 1 µm spatial resolution
- Extension to UPS, AES, SIMS and more
Applications
- Surface composition and chemical state analysis of semiconductors and materials
- Chemical state mapping
Other surface analysis instruments (xps/sims)
- JAMP-9510F · JEOL
- TXRF 3760 · Rigaku
- PHI GENESIS · ULVAC-PHI
All surface analysis instruments (xps/sims) and Japanese suppliers
More from Shimadzu
- DSC-60 Plus series · Thermal analysis instruments (TG-DTA/DSC)
- ICPMS-2050 · Contamination analysis equipment
- IRXross · Organic analysis instruments
Sources
Surface analysis instruments (XPS/SIMS)
Last updated: October 23, 2026