JAMP-9510F
An Auger microprobe with a hemispherical analyzer and a Schottky field emission electron gun. It analyzes chemical bonding states in nano to micro areas.
Maker: JEOL · Official product page
Specifications
| Analysis technique | AES (Auger electron spectroscopy) |
|---|---|
| Key feature | Analysis resolution 8 nm, image resolution 3 nm, up to 200 nA |
| Main applications | Composition and chemical state analysis of small areas |
Specifications as published by the maker. See the sources below.
Overview
JAMP-9510F is JEOL's field emission Auger microprobe. It irradiates samples with an electron beam and analyzes the Auger electrons emitted from the surface to study the elements in small areas of the surface.
Its Schottky field emission electron gun delivers stable high currents comparable to EPMA. Secondary electron image resolution is 3 nm (25 kV, 10 pA), the accelerating voltage is 0.5 to 30 kV, and the probe current is 10⁻¹¹ to 2×10⁻⁷ A. An electrostatic hemispherical analyzer (HSA) gives high energy resolution of 0.05 to 0.6%. A high-precision eucentric sample stage and a floating ion gun allow analysis of insulators, which had been difficult.
Spectral imaging, which saves the whole spectrum at each pixel, allows elements to be extracted after measurement for chemical state mapping, preventing missed elements. It is used for cross-section analysis of semiconductor devices, lithium-ion battery materials (especially lithium detection), and REELS analysis to distinguish carbon allotropes and evaluate band gaps of insulators and semiconductors.
Key features
- Secondary electron image resolution of 3 nm, Schottky FE electron gun
- Electrostatic hemispherical analyzer (energy resolution 0.05 to 0.6%)
- Floating ion gun also analyzes insulators
- Spectral imaging
Applications
- Elemental analysis of semiconductor device cross sections
- Band gap evaluation by REELS
Other surface analysis instruments (xps/sims)
- TXRF 3760 · Rigaku
- KRATOS ULTRA2 (AXIS Supra+) · Shimadzu
- PHI GENESIS · ULVAC-PHI
All surface analysis instruments (xps/sims) and Japanese suppliers
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Sources
Surface analysis instruments (XPS/SIMS)
Last updated: October 23, 2026