EXAVIS
The first integrated test platform that can test every kind of power semiconductor, from wafers to complex modules.
Maker: Advantest · Official product page
Specifications
| Target | Power devices such as SiC, GaN, IPM and IPD (wafer to module) |
|---|---|
| Dynamic testing | Up to 10 kA (including short-circuit testing) |
| Structure | Distributed computing architecture, modular racks |
Specifications as published by the maker. See the sources below.
Overview
EXAVIS is Advantest's integrated test platform for power semiconductors. It is the first platform to cover testing of all power semiconductor devices, from wafers to complex modules.
Its state-of-the-art design greatly reduces footprint and optimizes resources while keeping test performance. Besides wide-bandgap semiconductors such as SiC and GaN, it handles power devices with built-in digital functions such as IPMs and IPDs.
It offers high-bandwidth capture, precise gate driver control, dynamic and short-circuit testing up to 10 kA, and flexible high-voltage digital functions. A distributed computing architecture achieves multi-site efficiency among the best in the industry, and modular racks allow flexible upgrades.
Key features
- Integrated platform from wafers to modules
- Dynamic and short-circuit testing up to 10 kA
- Distributed computing architecture
Applications
- Testing SiC and GaN power devices
- Testing IPMs and IPDs
Other power semiconductor manufacturing equipment
- MT100 / MT200 · Advantest
- M-600 / 6000 series · Hitachi High-Tech
- SU-3300 · SCREEN Holdings
All power semiconductor manufacturing equipment and Japanese suppliers
More from Advantest
- 7038 System-Level Test System · Final test equipment
- B6700 series · Burn-in systems
- EVA100 · Analog test systems
- H5620 · Memory test systems
- HA1200 · Wafer probers
- HA7200 · MEMS manufacturing equipment
- HA7300 · MEMS manufacturing equipment
- M4173 · Test handlers
Sources
Power semiconductor manufacturing equipment
Last updated: October 23, 2026