SU7000
A Schottky field emission scanning electron microscope that acquires several signals at once to raise observation and analysis throughput.
Maker: Hitachi High-Tech · Official product page
Specifications
| Observation method | Schottky FE-SEM |
|---|---|
| Key feature | Simultaneous acquisition of 6 types of signals |
| Related models | Regulus series (cold field emission FE-SEM) / SU9000II |
| Main applications | Observation of fine structures and elemental analysis |
Specifications as published by the maker. See the sources below.
Overview
SU7000 is Hitachi High-Tech's ultra-high-resolution Schottky scanning electron microscope (FE-SEM). Today's FE-SEMs are expected not only to perform well but also to offer wide-field observation, in-situ analysis, low vacuum, high-resolution observation at low accelerating voltage and simultaneous acquisition of multiple signals, and SU7000 is designed to meet these needs.
Newly designed electron optics and detectors efficiently acquire several secondary and backscattered electron signals at once, and up to 6 signals can be processed, displayed and saved simultaneously. It covers a wide range of observation needs, from wide fields of view down to sub-nanometer structures.
The specimen chamber and vacuum system are optimized for large samples, multi-axis sample manipulation, low vacuum, cryo, and in-situ heating and cooling observation. The electron gun is a Schottky emitter that delivers beam currents up to 200 nA, also supporting microanalysis such as elemental analysis of small areas. It is used for morphology observation of semiconductor devices and materials.
Key features
- Simultaneous acquisition and display of up to 6 signals
- High-resolution observation at low accelerating voltage
- In-situ observation with low vacuum, cryo, heating and cooling
- Schottky emitter with up to 200 nA
Applications
- Morphology observation of semiconductor devices and materials
- Microanalysis of small areas
Other electron microscopes for observation (sem/tem)
- JSM-IT810 · JEOL
- OPTELICS® HYBRID+ · Lasertec
All electron microscopes for observation (sem/tem) and Japanese suppliers
More from Hitachi High-Tech
- 9000 series · Polysilicon etchers
- ArBlade® 5000 · Decapsulation and cross-sectioning equipment
- CG7300 · CD-SEMs
- CR7300 · Review SEMs
- CS5000 · CD-SEMs
- CT1000 · Review SEMs
- CV7300 · CD-SEMs
- DI2800 · Optical wafer inspection equipment
Sources
Electron microscopes for observation (SEM/TEM)
Last updated: October 23, 2026