CR7300
Hitachi High-Tech's high-speed review SEM whose newly designed electron optics and transfer system roughly double defect imaging capacity.
Maker: Hitachi High-Tech · Official product page
Specifications
| Electron source | Newly designed electron optics (high-speed electron beam scanning) |
|---|---|
| Key feature | VT-Scan (visualization of electrical characteristics), AI image processing |
| Main applications | Defect review and classification for advanced devices |
Specifications as published by the maker. See the sources below.
Overview
The CR7300 series is Hitachi High-Tech's in-line defect review SEM. It moves to the locations of defects found by optical and other inspection systems, takes high-resolution SEM images and identifies the type of defect, helping improve yield.
Its strengths are fast ADR (automatic defect review) and accurate ADC (automatic defect classification), and AI-ADC improves classification accuracy. Throughput is twice that of Hitachi's earlier tool, with SEM resolution for development and volume production of leading-edge devices.
It can also review and analyze defects on unpatterned wafers for the 3 nm generation, and can turn electrical characteristics (resistance and capacitance) into indicators partway through the semiconductor process. Related products include the DI4600 and DI2800 dark-field defect inspection systems and the LS series of wafer surface inspection systems.
Key features
- Fast ADR and accurate ADC (with AI-ADC)
- Twice the throughput of Hitachi's earlier tool
- Review of unpatterned wafers for the 3 nm generation
- Electrical characteristics (R/C) as indicators partway through the process
Applications
- Review and classification of defects found by inspection systems
- Yield improvement in development and volume production of leading-edge devices
Other review sems
- CT1000 · Hitachi High-Tech
More from Hitachi High-Tech
- 9000 series · Polysilicon etchers
- ArBlade® 5000 · Decapsulation and cross-sectioning equipment
- CG7300 · CD-SEMs
- CS5000 · CD-SEMs
- CV7300 · CD-SEMs
- DI2800 · Optical wafer inspection equipment
- DI4600 · Wafer inspection equipment
- GT2000 · CD-SEMs
Sources
Front-end equipment: more products
Last updated: October 23, 2026