CG7300
Hitachi High-Tech's high-reliability CD-SEM for volume production of EUV generation devices. Tool-to-tool matching is about 10% better than the previous model.
Maker: Hitachi High-Tech · Official product page
Specifications
| Measurement method | CD-SEM |
|---|---|
| Target generation | EUV volume production generation |
| Key feature | About 10% better tool-to-tool matching, charge control with fast scanning |
| Main applications | CD and CDU measurement on production lines |
Specifications as published by the maker. See the sources below.
Overview
CG7300 is Hitachi High-Tech's high-resolution FEB measurement system (CD-SEM). Positioned as a high-reliability CD-SEM for volume production of EUV generation devices, it performs a wide range of measurements with high accuracy and reliability.
Reducing tool-to-tool differences to the level of atomic size enables reliable process control. Tool-to-tool matching is about 10% better than the previous model. Better resistance to environmental effects and charge control with a fast scanning method give clearer, higher-resolution images.
Reduced distortion in low-magnification images lets it meet needs from precise CD measurement to wide-area CDU (CD uniformity) measurement. A fast transfer system raises throughput, and improvements to the edge exclusion area at the wafer periphery also help productivity.
Key features
- High-reliability CD-SEM for EUV volume production
- About 10% better tool-to-tool matching than the previous model
- High-resolution images with charge control by fast scanning
- Less low-magnification distortion for wide-area CDU measurement
Applications
- CD and CDU measurement on production lines for EUV generation devices
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Sources
Last updated: October 23, 2026