ArBlade® 5000
The top model of ion milling systems for preparing electron microscope samples. It supports both cross-section milling and flat milling.
Maker: Hitachi High-Tech · Official product page
Specifications
| Processing method | Ar ion milling (hybrid of cross-section and flat) |
|---|---|
| Processing speed | Cross-section milling rate of 1 mm/h or more |
| Processing range | Maximum milling width 8 mm (wide-area cross-section holder) |
| Main applications | Preparing cross-section and flat samples for SEM observation |
Specifications as published by the maker. See the sources below.
Overview
ArBlade 5000 is the top model of Hitachi High-Tech's ion milling systems for preparing electron microscope samples. It mills sample cross sections and surfaces with an argon ion beam, producing clean cross sections suited to SEM observation even for samples that mechanical polishing tends to scratch or deform. Hitachi has shipped more than 1,100 ion milling systems.
A high-rate Ar ion gun (PLUS II ion gun) with about twice the milling rate of Hitachi's earlier product gives a cross-section milling rate of 1 mm/h or more. For samples that need long processing, it greatly shortens cross-section milling time.
To meet the needs of the electronics field, Hitachi developed a slide milling holder that widens the cross-section milling area to 8 mm. Even hard materials such as ceramics and metals can be made into wide-area cross-section samples with high throughput. It is a hybrid tool that supports both cross-section and flat milling, and features such as automatic start from an LCD touch panel improve ease of use.
Key features
- Cross-section milling rate of 1 mm/h or more (about twice Hitachi's earlier product)
- 8 mm milling width with the slide milling holder
- Supports both cross-section and flat milling
- LCD touch panel with automatic start
Applications
- Cross-section sample preparation for semiconductor packages and electronic components
- Preparation of hard materials such as ceramics and metals
Other decapsulation and cross-sectioning equipment
More from Hitachi High-Tech
Sources
Last updated: October 23, 2026