CV7300
An in-line CD measurement SEM with 60 kV accelerating voltage. It measures deep holes and trenches in 3D NAND with 200 or more layers and overlay in advanced DRAM and logic.
Maker: Hitachi High-Tech · Official product page
Specifications
| Type | High-voltage CD-SEM (60 kV accelerating voltage) |
|---|---|
| Throughput | 20% higher than the previous model |
| Main applications | Deep hole and trench measurement in 3D NAND, overlay measurement in DRAM and logic |
Specifications as published by the maker. See the sources below.
Overview
CV7300 is Hitachi High-Tech's high-voltage CD-SEM (scanning electron microscope for dimension measurement). It is an in-line CD measurement SEM with an accelerating voltage of 60 kV.
It enables accurate dimension measurement of the deep holes and trenches needed to manufacture 3D NAND with 200 or more layers. It is also used for accurate overlay measurement in advanced DRAM and logic devices.
Throughput is 20% higher than the previous model, measurement accuracy for dimensions and overlay is improved, and tool-to-tool measurement variation is reduced.
Key features
- 60 kV accelerating voltage
- Dimension measurement of deep holes and trenches
- 20% higher throughput
- Less tool-to-tool variation
Applications
- Deep hole measurement in 3D NAND
- Overlay measurement in DRAM and logic
Other cd-sems
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Sources
Last updated: October 23, 2026