JSM-IT810
A Schottky field emission scanning electron microscope launched in 2024. It automates everything from instrument adjustment to observation and EDS analysis.
Maker: JEOL · Official product page
Specifications
| Observation method | Schottky FE-SEM |
|---|---|
| Key feature | Magnification up to 2,000,000x, accelerating voltage 0.01 to 30 kV, EDS/WDS/EBSD and others mounted together |
| Related models | JSM-IT800 (previous model, discontinued) |
| Main applications | Nanoscale observation and analysis |
Specifications as published by the maker. See the sources below.
Overview
JSM-IT810 is JEOL's Schottky field emission scanning electron microscope (FE-SEM). It combines versatility and high spatial resolution with automation, streamlining observation and analysis workflows with automation that needs no coding.
It has a Neo Action function that performs automatic observation and EDS analysis just by setting conditions and selecting measurement areas. An optional SEM auto-adjustment package automates magnification calibration, beam alignment and energy calibration. The user interface is easy to use even for people with little SEM experience.
A multi-segment semiconductor backscattered electron (BSE) detector allows real-time 3D surface reconstruction, and a keystone correction function helps EBSD measurement. Integrated EDS (energy dispersive X-ray spectroscopy) lets users schedule point, area, mapping and line analysis from the observation screen, removing the boundary between SEM observation and elemental analysis. It is used for semiconductor inspection and materials analysis.
Key features
- Automatic observation and EDS analysis with Neo Action
- Real-time 3D surface reconstruction with a multi-segment BSE detector
- Integrated EDS (point, area, mapping and line analysis)
- SEM auto-adjustment package (optional)
Applications
- Morphology observation and elemental analysis of semiconductor devices
- Materials analysis
Other electron microscopes for observation (sem/tem)
- SU7000 · Hitachi High-Tech
- OPTELICS® HYBRID+ · Lasertec
All electron microscopes for observation (sem/tem) and Japanese suppliers
More from JEOL
- Cross Section Polisher™ IB-19530CP · Decapsulation and cross-sectioning equipment
- JAMP-9510F · Surface analysis instruments (XPS/SIMS)
- JBX-3200MVS · Electron-beam mask writers
- JBX-8100FS · Electron-beam direct write systems
Sources
Electron microscopes for observation (SEM/TEM)
Last updated: October 23, 2026