OPTELICS® HYBRID+
A hybrid laser microscope that combines white-light confocal and laser confocal (405 nm) optics.
Maker: Lasertec · Official product page
Specifications
| Observation method | White-light / laser confocal microscope |
|---|---|
| Key feature | Choice of 6 wavelengths, differential interference, white-light interferometry, reflectance spectroscopy film thickness |
| Main applications | Observation and shape measurement of semiconductor materials, devices and MEMS |
Specifications as published by the maker. See the sources below.
Overview
OPTELICS HYBRID+ is Lasertec's hybrid laser microscope. As the industry's first hybrid laser microscope, it combines the functions of several instruments in one unit.
It has 6 functions: white-light confocal microscopy, laser confocal microscopy, differential interference observation, vertical scanning white-light interferometry, phase-shift interferometry and reflectance spectroscopy film thickness measurement. Its high magnification and resolution rival those of electron microscopes, and it visualizes tiny surface relief in real time with high contrast.
A frame rate of 15 Hz, among the highest in the industry, allows fast measurement. Vertical scanning white-light interferometry measures areas millimeters wide with nanometer precision, phase-shift interferometry measures shapes at the angstrom level, and reflectance spectroscopy measures transparent thin films under 1 µm thick. Options include LM eye measurement and analysis software, LIBRA automatic measurement software, LM Inspect automatic inspection and defect classification software, and the fully automatic W series.
Key features
- 6 observation and measurement functions in one unit
- Fast frame rate of 15 Hz
- White-light interferometry, phase-shift interferometry and reflectance spectroscopy film thickness
- Automatic measurement and defect classification software, fully automatic handling
Applications
- Surface shape observation of semiconductors and electronic components
- Measurement of steps, roughness and thin film thickness
Other electron microscopes for observation (sem/tem)
All electron microscopes for observation (sem/tem) and Japanese suppliers
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Sources
Electron microscopes for observation (SEM/TEM)
Last updated: October 23, 2026