Cross Section Polisher™ IB-19530CP
A cross-section sample preparation system that performs cross-section ion milling, flat milling and sputter coating by changing holders on a multi-purpose stage.
Maker: JEOL · Official product page
Specifications
| Processing method | Cross-section milling with an Ar ion beam |
|---|---|
| Processing speed | 500 µm/h (accelerating voltage 2 to 8 kV) |
| Processing range | Maximum sample 11 × 10 × 2 mm |
| Main applications | Cross-section preparation for SEM, EPMA and Auger analysis |
Specifications as published by the maker. See the sources below.
Overview
IB-19530CP is JEOL's Cross Section Polisher (ion beam processing system). It uses an argon ion beam to remove the scratches and deformation that mechanical polishing leaves in samples, producing high-quality samples suited to cross-section observation and crystal structure analysis.
The accelerating voltage is 2 to 8 kV, and the milling speed is 500 µm/h or more at 8 kV (Si equivalent, 100 µm from the edge). It has an automatic processing program that switches between fast processing and finishing, and an intermittent processing mode that limits sample heating.
A multi-purpose stage supports standard cross-section milling, wide-area cross-section milling up to 8 mm wide, flat milling, rotating cross-section milling and ion beam sputter coating. It is used for sample preparation in failure analysis of semiconductor devices and electronic components and in materials evaluation.
Key features
- Accelerating voltage of 2 to 8 kV, milling speed of 500 µm/h or more
- Automatic switching between fast processing and finishing
- Intermittent mode limits temperature rise
- Wide-area cross-section (8 mm wide), flat and rotating cross-section milling
Applications
- Cross-section sample preparation for failure analysis and materials evaluation
- Sample preparation for crystal structure analysis
Other decapsulation and cross-sectioning equipment
- ArBlade® 5000 · Hitachi High-Tech
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Sources
Last updated: October 23, 2026