Rigaku
A Japanese maker of X-ray analytical instruments whose semiconductor products include XRF and TXRF wafer metrology.
リガク・Equipment・Last updated: October 23, 2026
Overview
Rigaku makes X-ray metrology for semiconductor fabs. WaferX 310 is a wavelength-dispersive XRF spectrometer that measures film thickness and composition on 300 mm and 200 mm blanket wafers, and TXRF 3760 measures trace metal contamination on wafer surfaces by total reflection X-ray fluorescence, from sodium to uranium.
Rigaku also makes the Thermo plus EVO2 TG-DTA series for thermal analysis of materials.
Business: X-ray metrology and thermal analysis
Why it matters
TXRF is a standard method for monitoring metal contamination on wafers between process steps.
Main products
- •XRF film metrology (WaferX 310)
- •TXRF contamination analysis (TXRF 3760)
- •Thermal analysis (Thermo plus EVO2 TG-DTA)
Products (3)
- Thermo plus EVO2 TG-DTA series · Thermal analysis instruments (TG-DTA/DSC)
- TXRF 3760 · Surface analysis instruments (XPS/SIMS)
- WaferX 310 · Film composition analysis (XRF/FTIR)