ULVAC-PHI
A ULVAC group company in Chigasaki, Kanagawa that makes surface analysis instruments, including XPS and TOF-SIMS.
アルバック・ファイ・Equipment・Last updated: October 23, 2026
Overview
ULVAC-PHI is headquartered in Chigasaki, Kanagawa. PHI GENESIS is its flagship scanning XPS instrument, which can be extended to HAXPES, UPS and other techniques at the same measurement point. PHI nanoTOF 3+ is a TOF-SIMS with 50 nm spatial resolution and automatic charge neutralization for insulators.
Business: Surface analysis instruments (XPS, TOF-SIMS)
Why it matters
XPS and TOF-SIMS analyze the outermost nanometers of a surface, where contamination and interface problems show up.
Main products
- •X-ray photoelectron spectrometers (PHI GENESIS)
- •TOF-SIMS (PHI nanoTOF 3+)
Sites in Japan
Head officeHeadquarters
Chigasaki, Kanagawa
Products (2)
- PHI GENESIS · Surface analysis instruments (XPS/SIMS)
- PHI nanoTOF 3+ · Contamination analysis equipment