Wafer substrate inspection equipment
Substrate inspection equipment checks bare wafers for particles, scratches, crystal defects, flatness and electrical properties before devices are made on them. It is used by wafer makers for outgoing inspection and by chipmakers for incoming inspection.
What it does
Measurements include laser scattering inspection, flatness and warp, resistivity and carrier lifetime.
Products (3)
- SBW series flatness and shape measurement systems · Kobelco Research Institute
Kobelco Research Institute's systems that measure wafer flatness and shape by line scanning. 3-point pin support and gravity sag calculation give accurate Bow and Warp.
- MAGICS M5640 · Lasertec
A wafer defect inspection and review system that detects tiny defects from wafer manufacturing with 63 laser beams.
- NC-80MAP · Napson
A resistivity and sheet resistance instrument using the eddy current method, with multiple non-contact probes covering a wide range. It can take maps of up to 217 points.
Japanese makers in this category
- Kobelco Research Institute · 1 product(s) listed
- Lasertec · 1 product(s) listed
- Napson · 1 product(s) listed
Sources
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Wafer substrate inspection equipment
Last updated: October 23, 2026