i-line steppers
i-line steppers expose wafers one field at a time using the 365 nm i-line of a mercury lamp. They cannot print the finest features, but they are reliable, inexpensive to run and well suited to layers with relaxed dimensions.
What it does
They are the main lithography tools for power devices, analog ICs, MEMS, sensors and compound semiconductors, often on 200 mm and smaller wafers, and some models offer very large fields for image sensors and displays.
Products (7)
- FPA-3030i5a · Canon
An i-line stepper for small substrates that handles 50 to 200 mm wafers, with about 17% higher productivity and about 20% lower power consumption.
- FPA-3030i6 · Canon
An i-line stepper for small substrates of 200 mm and below. A new high-transmittance lens reduces aberration and raises throughput to 130 wafers per hour.
- FPA-3030iWa · Canon
A low-NA i-line stepper for power and IoT devices. It exposes a wide 52 × 52 mm field in one shot.
- FPA-5550iX · Canon
An i-line stepper for the front end that combines high resolution of 0.5 µm with a wide 50 × 50 mm field.
- FPA-5550iZ2 · Canon
Canon's i-line stepper for the front end. It offers productivity and overlay accuracy among the best for i-line tools and handles 200 and 300 mm wafers.
- NSR-2205iL1 · Nikon
Nikon's i-line stepper with 5x reduction projection. It handles many devices and wafer materials, such as power semiconductors and MEMS.
- NSR-SF155 · Nikon
Nikon's i-line stepper. It processes 200 wafers per hour or more with resolution of 280 nm or less.
Japanese makers in this category
Other front-end equipment
Sources
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Last updated: October 23, 2026