Gigaphoton
A Tochigi-based maker of excimer lasers used as light sources in KrF and ArF lithography.
ギガフォトン・Equipment・Last updated: October 23, 2026
Overview
Gigaphoton is headquartered in Tochigi Prefecture. Its GT66A, announced in October 2021, is an ArF immersion light source for the 5 nm node and beyond. It cuts speckle contrast by 30% to reduce edge placement error and line roughness, and extends the maintenance cycle by 30%.
Business: Excimer laser light sources for lithography
Why it matters
The light source sets limits on pattern quality in DUV lithography, so laser properties matter more as patterns shrink.
Main products
- •ArF immersion excimer lasers (GT66A)
Sites in Japan
Head officeHeadquarters
Tochigi
Products (1)
- GT66A · Excimer lasers