DUV lithography systems
DUV lithography equipment projects a reduced image of a mask pattern onto the wafer with deep ultraviolet light from KrF (248 nm) or ArF (193 nm) excimer lasers. ArF immersion scanners, which place water between the lens and the wafer, print the finest DUV patterns, often combined with multiple patterning.
What it does
DUV scanners and steppers expose most layers of a chip, including at advanced nodes where EUV is used only for the most critical layers, so throughput and overlay accuracy are as important as resolution.
Products (10)
- FPA-3030EX6 · Canon
Canon's KrF stepper for IoT-related devices. It handles a variety of 100 to 200 mm substrates and shares its wafer transfer system with the FPA-3030i5+ i-line stepper.
- FPA-6300ES6a · Canon
Canon's high-productivity KrF scanner. It processes 300 wafers per hour or more with overlay accuracy of 5 nm or less, among the best for KrF scanners.
- FPA-6300ESW · Canon
The only KrF scanner in the world that can expose 33 × 42.2 mm in one shot, exposing full-size CMOS sensors without stitching.
- NSR-S215D · Nikon
Nikon's KrF scanner that handles both 200 mm and 300 mm wafers and is highly compatible with existing KrF scanners.
- NSR-S220D · Nikon
Nikon's KrF scanner with the Streamlign Platform, achieving 230 wafers per hour or more and tool-to-tool overlay accuracy of 6 nm or less.
- NSR-S322F · Nikon
Nikon's ArF (dry) scanner with the Streamlign Platform proven on immersion tools.
- NSR-S333F · Nikon
Nikon's ArF (dry) scanner built on the ArF immersion scanner platform. It combines 300 wafers per hour or more with MMO of 4 nm or less.
- NSR-S625E · Nikon
Nikon's ArF immersion scanner for mid-critical layers. Throughput is about 1.3 times the previous model, and it carries iAS.
- NSR-S635E · Nikon
Nikon's ArF immersion scanner with an integrated inline Alignment Station (iAS). The Streamlign platform gives high productivity.
- NSR-S636E · Nikon
Nikon's ArF immersion scanner for critical layers that combines overlay accuracy and throughput at a high level.
Japanese makers in this category
Other front-end equipment
Sources
- Canon: FPA-3030EX6 product page
- Canon: FPA-6300ES6a product page
- Canon: FPA-6300ESW product page
- Nikon: NSR-S215D product page
- Nikon: NSR-S220D product page
- Nikon: NSR-S322F product page
- Nikon: NSR-S333F product page
- Nikon: NSR-S625E product page
- Nikon: NSR-S635E product page
- NSR-S635E catalog (PDF)
- Nikon: NSR-S636E product page
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Last updated: October 23, 2026