Wafer-level packaging equipment

DAS8930

A semi-automatic 300 mm surface planer that flattens metal and resin with ultra-high precision using a diamond bit.

Maker: DISCO · Official product page

Specifications


TypeDiamond bit surface planing (1 spindle, 1 chuck table)
Processing accuracyTTV 3.0 µm or less, bump height variation 1.0 µm or less (5 mm square)
Surface roughnessRa 0.02 µm or less

Specifications as published by the maker. See the sources below.

Overview


DAS8930 is DISCO's semi-automatic surface planer for 300 mm workpieces.

Ultra-precise planarization with a diamond bit flattens ductile materials such as metals, resins and composites of them with high accuracy, solving problems of height variation in bumps and of surface roughness.

Processing accuracy is a TTV of 3.0 µm or less, bump height variation of 1.0 µm or less within a 5 mm square chip, and a cut surface roughness of Ra 0.02 µm or less. The lineup also includes the fully automatic DFS8960 and other models.

Key features


Applications


Other wafer-level packaging equipment


All wafer-level packaging equipment and Japanese suppliers

More from DISCO


Sources


  1. DISCO: DAS8930 product page

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Wafer-level packaging equipment

Last updated: October 23, 2026