DI4600
Hitachi High-Tech's dark-field patterned wafer defect inspection system that inspects the whole wafer quickly with a sheet beam. It is used for in-line defect control of advanced memory and logic.
Maker: Hitachi High-Tech · Official product page
Specifications
| Inspection target | Patterned wafers (φ300 mm only) |
|---|---|
| Detection method | Dark field (sheet beam, spatial filter) |
| Key feature | High throughput with detection sensitivity, high tool-to-tool matching |
| Main applications | In-line defect control of advanced memory and logic |
Specifications as published by the maker. See the sources below.
Overview
DI4600 is Hitachi High-Tech's dark-field wafer defect inspection system. It is used for monitoring production line conditions (in-line defect control) so that chipmakers can quickly find abnormalities that cause yield loss.
It combines technology that inspects the whole wafer quickly with a sheet beam, technology that uses a spatial filter to separate light scattered by patterns from light scattered by defects, and Hitachi's own optics, achieving fast inspection with high defect detection performance.
By combining better defect detection with high throughput, it has been adopted as an in-line defect control tool in leading-edge memory and logic manufacturing. Its own optics, suited to running many tools, give high tool-to-tool matching, and recipes can be created with simple parameter settings. It is for φ300 mm wafers only.
Key features
- Fast full-wafer inspection with a sheet beam
- Spatial filter separates pattern scattering from defect scattering
- High throughput together with detection sensitivity
- High tool-to-tool matching and simple recipe setup
Applications
- In-line defect control of leading-edge memory and logic
Also listed under: Defect inspection equipment
More from Hitachi High-Tech
- 9000 series · Polysilicon etchers
- ArBlade® 5000 · Decapsulation and cross-sectioning equipment
- CG7300 · CD-SEMs
- CR7300 · Review SEMs
- CS5000 · CD-SEMs
- CT1000 · Review SEMs
- CV7300 · CD-SEMs
- DI2800 · Optical wafer inspection equipment
Sources
Front-end equipment: more products
Last updated: October 23, 2026