Defect inspection equipment
CIRIUS series
A system that inspects and reviews internal defects in high-stack devices such as 3D NAND and in bonded wafers.
Maker: Lasertec · Official product page
Specifications
| Type | Internal defect inspection with proprietary optics + review optics |
|---|---|
| Functions | Depth classification of internal defects |
| Target | High-stack devices such as 3D NAND, bonded wafers |
Specifications as published by the maker. See the sources below.
Overview
The CIRIUS series is Lasertec's high-sensitivity internal defect inspection and review system, announced in December 2022. It is designed for processes with ever higher stacks.
Proprietary optics sensitively inspect defects inside the wafer, and review optics classify internal defects by depth. Throughput is also high.
It is used to inspect internal defects in high-stack devices such as 3D NAND and internal defects after wafer bonding.
Key features
- High-sensitivity internal defect inspection
- Defect classification by depth
- High throughput
Applications
- Internal defect inspection of 3D NAND
- Inspection of bonded wafers
Other defect inspection equipment
- DI4600 · Hitachi High-Tech
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Sources
Front-end equipment: more products
Last updated: October 23, 2026