ACTIS A200HiT series

Specifications

Specifications as published by the maker. See the sources below.

Overview

The ACTIS A200HiT series is Lasertec's actinic EUV patterned mask defect inspection system. Announced in October 2025, it is the high-throughput ACTIS model for wafer fabs.

It catches printable defects on EUV masks quickly and sensitively, with 3 times the inspection speed of ACTIS A150.

It detects printable defects that arise while EUV masks are in use at wafer fabs. It is used for incoming and periodic quality inspection of EUV masks at fabs.

Key features

• 3 times the inspection speed of A150
• High-throughput model for fabs

Applications

• Incoming and periodic inspection of EUV masks at fabs

Other mask inspection equipment

• MASK DR-SEM E5620 · Advantest
• ABICS E120 · Lasertec
• ABICS E320 · Lasertec
• ACTIS A150 · Lasertec
• ACTIS A300 series · Lasertec
• BASIC series · Lasertec
• MAGICS M6750 / M6751 · Lasertec
• MAGICS M9650 / M9651 · Lasertec

All mask inspection equipment and Japanese suppliers

More from Lasertec

• BGM300 · TSV formation equipment
• BIM300 · Surface profilers
• CIEL series · Macro inspection equipment
• CIRIUS series · Defect inspection equipment
• EZ300 · Macro inspection equipment
• GALOIS211 · Crystal defect inspection equipment
• LX series · Macro inspection equipment
• MAGICS M5640 · Wafer substrate inspection equipment

Sources

1. Lasertec: ACTIS A200HiT product page

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