BASIC series

Specifications

Specifications as published by the maker. See the sources below.

Overview

The BASIC series is Lasertec's EUV mask back-side inspection and cleaning system. It was announced in February 2013 and won the Grand Prix in the semiconductor manufacturing equipment category of Semiconductor of the Year 2013.

It combines in one tool the detection of particles on the back of EUV masks, measurement of the height of particles that would affect EUV exposure, and cleaning (removal) of those particles.

Dual Pod handling with no risk of particle generation and a scanning method that does not damage patterns achieve inspection times usable in EUV volume production. Fully automatic inspection linked to OHT and a compact all-in-one design with built-in power and control systems are further strengths.

Key features

• Detection, height measurement and cleaning in one tool
• Dual Pod handling
• Fully automatic inspection linked to OHT

Applications

• Periodic control and incoming inspection of EUV mask back sides

Other mask inspection equipment

• MASK DR-SEM E5620 · Advantest
• ABICS E120 · Lasertec
• ABICS E320 · Lasertec
• ACTIS A150 · Lasertec
• ACTIS A200HiT series · Lasertec
• ACTIS A300 series · Lasertec
• MAGICS M6750 / M6751 · Lasertec
• MAGICS M9650 / M9651 · Lasertec

All mask inspection equipment and Japanese suppliers

More from Lasertec

• BGM300 · TSV formation equipment
• BIM300 · Surface profilers
• CIEL series · Macro inspection equipment
• CIRIUS series · Defect inspection equipment
• EZ300 · Macro inspection equipment
• GALOIS211 · Crystal defect inspection equipment
• LX series · Macro inspection equipment
• MAGICS M5640 · Wafer substrate inspection equipment

Sources

1. Lasertec: BASIC series product page

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