ACTIS A150
The world's first EUV patterned mask defect inspection system. It uses 13.5 nm EUV light, the same as exposure, to sensitively detect defects that print.
Maker: Lasertec · Official product page
Specifications
| Type | Actinic inspection (EUV light, 13.5 nm) |
|---|---|
| Target | EUV masks (pellicle-mounted masks supported) |
| Awards | 2019 Top 10 New Products Award, Semiconductor of the Year 2020 Grand Prix |
Specifications as published by the maker. See the sources below.
Overview
ACTIS A150 is Lasertec's actinic EUV patterned mask defect inspection system. It was announced in September 2019 as the world's first EUV patterned mask defect inspection system.
Its EUV light source with a wavelength of 13.5 nm greatly improves defect detection sensitivity over conventional DUV light sources. Because it inspects with light of the same wavelength as the wafer exposure tool (actinic inspection), it can sensitively detect defects that print during exposure. It can also inspect pellicle-mounted EUV masks.
It received the Nippon Ryoku Award in the Nikkan Kogyo Shimbun's 2019 Top 10 New Products Award and the Grand Prix in the semiconductor manufacturing equipment category of Semiconductor of the Year 2020. It is used in EUV mask manufacturing and for incoming and periodic inspection at fabs.
Key features
- World's first EUV patterned mask inspection
- Inspects at 13.5 nm, the same as exposure
- Supports pellicle-mounted masks
Applications
- Defect inspection of EUV masks
Other mask inspection equipment
- MASK DR-SEM E5620 · Advantest
- ABICS E120 · Lasertec
- ABICS E320 · Lasertec
- ACTIS A200HiT series · Lasertec
- ACTIS A300 series · Lasertec
- BASIC series · Lasertec
- MAGICS M6750 / M6751 · Lasertec
- MAGICS M9650 / M9651 · Lasertec
More from Lasertec
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
- CIEL series · Macro inspection equipment
- CIRIUS series · Defect inspection equipment
- EZ300 · Macro inspection equipment
- GALOIS211 · Crystal defect inspection equipment
- LX series · Macro inspection equipment
- MAGICS M5640 · Wafer substrate inspection equipment
Sources
Last updated: October 23, 2026