Film thickness metrology
Film thickness metrology measures how thick deposited, grown or remaining films are, usually by optical interference: light reflected from the top and bottom of a film interferes in a way that depends on its thickness and optical constants.
What it does
Spectral reflectance tools measure quickly at many points across the wafer, while ellipsometers also determine optical constants and handle very thin films.
Products (3)
- VM-1020 · SCREEN Holdings
A microscope-type optical interference film thickness measurement system suited to R&D. Users can register their own film types.
- VM-1200 / VM-1300 · SCREEN Holdings
A tabletop optical interference film thickness measurement system that can also be used on production lines. It measures stacks of up to 4 layers at once.
- VM-2500 / VM-3500 · SCREEN Holdings
An optical interference film thickness measurement system suited to multi-point measurement across the wafer, for devices such as communication devices. 160 wafers per hour in high-speed mode.
Japanese makers in this category
- SCREEN Holdings · 3 product(s) listed
Other front-end equipment
Sources
Related calculators
Last updated: October 23, 2026