ZI-2000
A patterned wafer visual inspection system for 76 to 200 mm wafers designed for speed, compact size and cost performance.
Maker: SCREEN Holdings · Official product page
Specifications
| Wafer size | 76 to 200 mm |
|---|---|
| Inspection method | Comparison inspection (Die to Die, Cell to Cell) |
| Optical resolution | 1.5 µm, 4 µm |
Specifications as published by the maker. See the sources below.
Overview
ZI-2000 is SCREEN's patterned wafer visual inspection system. Designed for speed, compact size and cost performance, it covers a wide range from in-line front-end inspection, which needs flexibility, to final visual inspection, which needs speed.
An inspection head using in-house lenses and illumination and a high-speed image processing engine deliver high throughput unaffected by chip size or number.
Comparison inspection (Die to Die, Cell to Cell) needs no prior training images, so inspection recipes are easy to create and new wafers can be inspected right away. Inspection results, including images of defect candidates, can be checked in real time, and real-time automatic defect classification (ADC) shows only the results that matter. The light source is a three-color RGB LED.
Key features
- Comparison inspection with no training images
- Real-time ADC
- Three-color RGB LED illumination
Applications
- In-line inspection and final visual inspection
Other macro inspection equipment
- CIEL series · Lasertec
- EZ300 · Lasertec
- LX series · Lasertec
- AMI-5700 · Nikon
- OPTISTATION-3200 · Nikon
- ZI-3600 · SCREEN Holdings
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RE-3500 · Ellipsometers
Sources
Macro inspection equipment
Last updated: October 23, 2026