ZI-3600
A visual inspection system that carries 3 lenses of different resolution at once, inspecting everything from fine defects under 1 µm to macro defects.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Full-wafer inspection with a line sensor |
|---|---|
| Throughput | About twice the previous model (ZI-3500) |
| Options | CD measurement, overlay measurement |
Specifications as published by the maker. See the sources below.
Overview
ZI-3600 is SCREEN's patterned wafer visual inspection system. It carries 3 types of lenses with different resolutions, combining high resolution with high productivity.
An in-house inspection head and an improved high-speed image processing engine give about twice the capacity of the previous ZI-3500. Because it inspects the full wafer with a line sensor, inspection speed is constant regardless of chip size or number.
A new objective lens allows detection and failure analysis of fine defects under 1 µm. Switching automatically among the 3 types of lenses, one tool inspects everything from fine defects to macro defects. Inspection conditions can be set while viewing actual wafer images, and CD and overlay measurement can be run at the same time as inspection as options.
Key features
- 3 types of lenses on one tool
- Detects fine defects under 1 µm
- About twice the throughput
- CD and overlay measurement (optional)
Applications
- In-line visual inspection
- Failure analysis
Other macro inspection equipment
- CIEL series · Lasertec
- EZ300 · Lasertec
- LX series · Lasertec
- AMI-5700 · Nikon
- OPTISTATION-3200 · Nikon
- ZI-2000 · SCREEN Holdings
More from SCREEN Holdings
- CW-2000 · Batch wafer cleaning equipment
- DR-8000 · Mask dimension and flatness metrology
- DT-3000 (SOKUDO DUO) · Coater/developers
- DW-3100 · Laser direct imaging systems
- FC-3100 · Batch wafer cleaning equipment
- FC-821L · Batch wafer cleaning equipment
- LA-3100 · Laser annealing equipment
- RE-3500 · Ellipsometers
Sources
Macro inspection equipment
Last updated: October 23, 2026