OPTISTATION-3200
Nikon's wafer visual inspection system that performs macro and microscope inspection in one tool. It is widely used from front-end to back-end processes.
Maker: Nikon · Official product page
Specifications
| Lineup | OPTISTATION-3200 (front end) / 3100 / 3000 (back end) |
|---|---|
| Wafer size | 300 mm, 200 mm (3100 / 3000 can also handle both) |
| Microscope | 6 objective lenses, bright field / dark field |
Specifications as published by the maker. See the sources below.
Overview
OPTISTATION-3200 is Nikon's wafer visual inspection system. It performs macro and microscope inspection in one tool, making visual inspection of 300 mm and 200 mm wafers simple and quick. It is used both as an in-line inspection system and as a defect analysis tool in R&D.
For macro inspection, the wafer is held at the center or edge of its back side and turned to various angles with a joystick while the operator visually checks for particles, scratches and uneven resist coating. Capturing macro images can also replace visual inspection. For micro inspection, it switches among 6 high-NA, long working distance CFI60-2 objective lenses and between bright field and dark field.
The series includes the 2-port OPTISTATION-3200 for the front end, the 3100 with an automatic stage and the 3000 with a manual stage. Options include differential interference contrast observation, infrared observation, 3D measurement, edge bead removal (EBR) width measurement, edge chip detection and KLARF review.
Key features
- Macro and microscope inspection in one tool
- 6 objective lenses
- Bright field and dark field
- From front end to back end
Applications
- In-line visual inspection
- Defect analysis in R&D
Other macro inspection equipment
More from Nikon
- DSP-100 · Laser direct imaging systems
- Litho Booster · Overlay metrology
- NSR-2205iL1 · i-line steppers
- NSR-S215D · DUV lithography systems
- NSR-S220D · DUV lithography systems
- NSR-S322F · DUV lithography systems
- NSR-S333F · DUV lithography systems
- NSR-S625E · DUV lithography systems
Sources
Macro inspection equipment
Last updated: October 23, 2026