EZ300
A system that inspects defects at the wafer periphery with confocal optics and classifies them automatically, including whether they are raised or recessed.
Maker: Lasertec · Official product page
Specifications
| Type | Confocal optics |
|---|---|
| Functions | Automatic defect classification including raised/recessed judgment, high-resolution 3D measurement |
| Main applications | Yield control at the wafer periphery |
Specifications as published by the maker. See the sources below.
Overview
The EZ series is Lasertec's wafer edge profile measurement system. It is used for quantitative yield control at the wafer periphery and for analyzing process abnormalities.
It inspects defects in high-contrast images from confocal optics and classifies them automatically with its own algorithms, including judging whether they are raised or recessed. A high-resolution 3D measurement function makes it easy to identify or infer the type of defect.
It is used for quantitative control of the wafer periphery and early alarms for process abnormalities through inline QC, for follow-up analysis with SPC when defective chips occur at the periphery, and to understand the causes of yield loss from defects at the periphery.
Key features
- Confocal optics
- Automatic classification including raised/recessed judgment
- High-resolution 3D measurement
Applications
- Yield control at the wafer periphery
Other macro inspection equipment
- CIEL series · Lasertec
- LX series · Lasertec
- AMI-5700 · Nikon
- OPTISTATION-3200 · Nikon
- ZI-2000 · SCREEN Holdings
- ZI-3600 · SCREEN Holdings
More from Lasertec
- ABICS E120 · Mask inspection equipment
- ABICS E320 · Mask inspection equipment
- ACTIS A150 · Mask inspection equipment
- ACTIS A200HiT series · Mask inspection equipment
- ACTIS A300 series · Mask inspection equipment
- BASIC series · Mask inspection equipment
- BGM300 · TSV formation equipment
- BIM300 · Surface profilers
Sources
Macro inspection equipment
Last updated: October 23, 2026