Macro inspection equipment
Macro inspection equipment images the whole wafer, or areas such as the edge and bevel, to catch large-area problems that point inspection misses: uneven film thickness or etch depth, CD variation across the wafer, and defects at the wafer edge.
What it does
Because it covers the full wafer quickly, it is used for routine monitoring of volume production and for feeding results back to the process.
Products (7)
- CIEL series · Lasertec
A high-sensitivity wafer edge inspection system that detects and classifies tiny defects on the wafer edge and bevel that could not be classified before.
- EZ300 · Lasertec
A system that inspects defects at the wafer periphery with confocal optics and classifies them automatically, including whether they are raised or recessed.
- LX series · Lasertec
A multi-wavelength wafer inspection system that quickly inspects film thickness, etch variation and CD across the whole wafer using light of several wavelengths.
- AMI-5700 · Nikon
Nikon's automated macro inspection system that images the whole wafer at once for fast inspection and also measures CD, film thickness and focus in one tool.
- OPTISTATION-3200 · Nikon
Nikon's wafer visual inspection system that performs macro and microscope inspection in one tool. It is widely used from front-end to back-end processes.
- ZI-2000 · SCREEN Holdings
A patterned wafer visual inspection system for 76 to 200 mm wafers designed for speed, compact size and cost performance.
- ZI-3600 · SCREEN Holdings
A visual inspection system that carries 3 lenses of different resolution at once, inspecting everything from fine defects under 1 µm to macro defects.
Japanese makers in this category
- Lasertec · 3 product(s) listed
- Nikon · 2 product(s) listed
- SCREEN Holdings · 2 product(s) listed
Other front-end equipment
Sources
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Japanese equipment by category
Macro inspection equipment
Last updated: October 23, 2026