SC-80EX
A system that spray-coats resist and protective films onto non-planar structures with steps and onto through-hole substrates. Semiconductor of the Year 2015 Grand Prix.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Spray coating (with wafer temperature control) |
|---|---|
| Wafer size | 100 to 200 mm |
| Nozzles | Up to 2 for chemicals, 1 for solvent |
Specifications as published by the maker. See the sources below.
Overview
SC-80EX is SCREEN's spray coater. In manufacturing MEMS, SAW devices, power devices and others, there is a growing need to form patterns on devices with non-planar structures and to coat a variety of materials. It won the Grand Prix of Semiconductor of the Year 2015.
SCREEN's own spray coating technology coats resist and protective film materials stably and uniformly onto stepped substrates with relief and through-hole substrates, which are difficult for spin coaters. Repeated coats of low-viscosity resist build up thick films, using less chemical than a spin coater.
Tool configurations can be built for anything from R&D to volume production, and SCREEN's own transfer system and multiple processing units give high throughput. A simple structure and suppressed mist scattering make maintenance easy.
Key features
- Spray coating onto stepped and through-hole substrates
- Thick films with less chemical
- Supports 100 to 200 mm
Applications
- Coating non-planar structures of MEMS and SAW devices
- Protective film coating for power devices
Other coater/developers
- DT-3000 (SOKUDO DUO) · SCREEN Holdings
- RF-200EX / RF-300EX · SCREEN Holdings
- SK-60EX / SK-80EX · SCREEN Holdings
- CLEAN TRACK™ LITHIUS Pro™ · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ AP · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro DICE · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ V · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro Z · Tokyo Electron (TEL)
More from SCREEN Holdings
Sources
Last updated: October 23, 2026