SK-60EX / SK-80EX
Coater/developers that carry on the long-selling 60/80 series. They handle many substrates, including thin wafers, glass, LT and sapphire.
Maker: SCREEN Holdings · Official product page
Specifications
| Type | Coating and developing |
|---|---|
| Supported substrates | Thin wafers, thick substrates, glass, LT, sapphire, magnetic material substrates and others |
| Compatibility | Recipe compatible with the 60/80 series |
Specifications as published by the maker. See the sources below.
Overview
SK-60EX/SK-80EX are SCREEN's coater/developers (coating and developing systems). Their applications and functions have been expanded to meet the diverse manufacturing needs of electronic devices.
They carry on the highly reliable design philosophy of the widely used 60/80 series and also support functions for advanced fields and special applications. The control system has been renewed for future expansion, while process recipe compatibility with the 60/80 series is kept for smooth capacity additions.
Many options matched to substrate properties let them handle diverse substrates, including thin wafers, thick substrates, AlTiC and ferrite magnetic material substrates, glass substrates, LT substrates, sapphire substrates and substrates patterned on both sides.
Key features
- Reliability carried over from the 60/80 series
- Recipe compatibility maintained
- Options for many substrates
Applications
- Lithography for MEMS, SAW devices, magnetic heads and others
Other coater/developers
- DT-3000 (SOKUDO DUO) · SCREEN Holdings
- RF-200EX / RF-300EX · SCREEN Holdings
- SC-80EX · SCREEN Holdings
- CLEAN TRACK™ LITHIUS Pro™ · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ AP · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro DICE · Tokyo Electron (TEL)
- CLEAN TRACK™ LITHIUS Pro™ V · Tokyo Electron (TEL)
- CLEAN TRACK LITHIUS Pro Z · Tokyo Electron (TEL)
More from SCREEN Holdings
Sources
Last updated: October 23, 2026