Coater/developers
A coater/developer, or track, coats wafers with photoresist, bakes them, passes them to the lithography scanner and then develops the exposed pattern. It is connected inline to the scanner so that wafers move through all of these steps without leaving the system.
What it does
Every lithography scanner, from i-line to EUV, works together with a coater/developer.
Products (9)
- DT-3000 (SOKUDO DUO) · SCREEN Holdings
A dual-track coater/developer that runs two process lines in parallel. It reaches high throughput while keeping transfer speed moderate.
- RF-200EX / RF-300EX · SCREEN Holdings
Coater/developers for next-generation power and automotive devices. RF-200EX is dedicated to 200 mm, and RF-300EX handles thin wafers.
- SC-80EX · SCREEN Holdings
A system that spray-coats resist and protective films onto non-planar structures with steps and onto through-hole substrates. Semiconductor of the Year 2015 Grand Prix.
- SK-60EX / SK-80EX · SCREEN Holdings
Coater/developers that carry on the long-selling 60/80 series. They handle many substrates, including thin wafers, glass, LT and sapphire.
- CLEAN TRACK™ LITHIUS Pro™ · Tokyo Electron (TEL)
TEL's coater/developer that raises productivity while keeping a small footprint, greatly reducing the cleanroom area it occupies. It supports immersion lithography.
- CLEAN TRACK™ LITHIUS Pro™ AP · Tokyo Electron (TEL)
TEL's coater/developer optimized for next-generation packaging, with support for high-viscosity materials and spin-on hard masks.
- CLEAN TRACK LITHIUS Pro DICE · Tokyo Electron (TEL)
A 300 mm coater/developer that carries on the product concept of LITHIUS Pro Z, with defect control technology for the ultra-fine patterning of High-NA EUV.
- CLEAN TRACK™ LITHIUS Pro™ V · Tokyo Electron (TEL)
TEL's coater/developer that pushes overall equipment efficiency (OEE) to the limit to maximize throughput per day.
- CLEAN TRACK LITHIUS Pro Z · Tokyo Electron (TEL)
A 300 mm coater/developer for the 10 nm node and beyond, long used in volume production for advanced lithography, including EUV.
Japanese makers in this category
- SCREEN Holdings · 4 product(s) listed
- Tokyo Electron (TEL) · 5 product(s) listed
Other front-end equipment
Sources
Related calculators
Japanese equipment by category
Last updated: October 23, 2026